MDX 系列10 kW电源在真空环境中经久耐用,其小巧的尺寸使其成为实验室系统的理想解决方案。它们最常用作直流磁控溅射电源;在该领域,二者精密的调节性能、 的灭弧功能和较低的存储输出能量使之成为业界 产品。它们还在射频溅射和蚀刻系统中被用作精密调节的偏压电源。
AE MDX直流磁控溅射电源:
Equipment Details: DC Magnetron Sputtering Power Supply
Used as DC magnetron sputtering drives where regulation, superior arc quenching and low output energy are required
Standard Z
Power Output: 10 kW
Regulation: 0.25 percent in all modes, power, current, voltage
Remote panel controller
208V, 3 Ph, 50/60 Hz, 38A.